E19700 - SEMI E197 - Specification for Large Tray Stack FOUP (LTSF) Revision:SEMI E197-0226 (Preliminary) - Current Noncontact Measurement of Thickness and

Noncontact Measurement of Thickness and Thickness Variation of Silicon Wafers for PV Applications Using Capacitive Probes

This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment

注意：此安全規範於2003年完全重新改寫。

SEMI MF1392-1103 (first SEMI publication)

E19700 - SEMI E197 - Specification for Large Tray Stack FOUP (LTSF) Revision:SEMI E197-0226 (Preliminary) - Current Noncontact Measurement of Thickness andNOTICE: This is a Preliminary Standard. Preliminary Standards are approved for publication by a single chapter of a technical global committee for information and comment prior to letter balloting for its adoption as a Full consensus Standard. Preliminary Standards are published for a period of no more than two years, unless a publication extension is granted by the International Standards Committee. This Preliminary Standard will be removed from